Magnetic Recharge Czochralski
Magnetic Recharge Czochralski (MCZ) for the customers with high oxygen sensitivity
- Silicon melt is a conductor. It interacts with a magnetic field, as any moving conductor does.
- Moving melt generates current in the presence of a magnetic field. The interaction between the current and the magnetic field generates the body force that acts precisely in the opposite direction of the motion of the melt.
- Application of the magnetic field to control the melt flow, and thereby, oxygen transport through the melt into the crystal, is well established in the semiconductor crystal growth.
- Oxygen concentration can be reduced to less than 8 ppma, as low as 5-6 ppma, in the presence of the right magnetic field
